Hybrid layered polymer slot waveguide Young interferometer

We demonstrate a polymer slot waveguide Young interferometer coated with a bilayer of Al O /TiO . The approach enables relaxed dimensions of the polymer waveguide which simplifies the fabrication of the structure with a resolution of 50 nm. The layers were coated by an atomic layer deposition techni...

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Bibliographic Details
Published inOptics express Vol. 24; no. 10; pp. 10275 - 10285
Main Authors Ahmadi, Leila, Hiltunen, Marianne, Stenberg, Petri, Hiltunen, Jussi, Aikio, Sanna, Roussey, Matthieu, Saarinen, Jyrki, Honkanen, Seppo
Format Journal Article
LanguageEnglish
Published United States 16.05.2016
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Summary:We demonstrate a polymer slot waveguide Young interferometer coated with a bilayer of Al O /TiO . The approach enables relaxed dimensions of the polymer waveguide which simplifies the fabrication of the structure with a resolution of 50 nm. The layers were coated by an atomic layer deposition technique. The feasibility of the device was investigated by exploiting the interferometric structure as a bulk refractive index sensor operating at 975 nm wavelength for detection of an ethanol-water solution. A refractive index change of 1 × 10 RIU with a sensing length of only 800 µm was detected. The approach confirms the possibility of realizing a low cost device with a small footprint and enhanced sensitivity by employing the TiO rails in the sides of the slot waveguide.
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ISSN:1094-4087
1094-4087
DOI:10.1364/OE.24.010275