X-ray ultramicroscopy using integrated sample cells
The X-ray ultramicroscope (XuM), based on using a scanning electron microscope as host, provides a new approach to X-ray projection microscopy. The right-angle-type integrated sample cells described here expand the capabilities of the XuM technique. The integrated sample cell combines a target, a sp...
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Published in | Optics express Vol. 14; no. 17; pp. 7889 - 7894 |
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Main Authors | , , , , , |
Format | Journal Article |
Language | English |
Published |
United States
21.08.2006
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Online Access | Get full text |
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Summary: | The X-ray ultramicroscope (XuM), based on using a scanning electron microscope as host, provides a new approach to X-ray projection microscopy. The right-angle-type integrated sample cells described here expand the capabilities of the XuM technique. The integrated sample cell combines a target, a spacer, a sample chamber, and an exit window in one physical unit, thereby simplifying the instrumentation and providing increased mechanical stability. The XuM imaging results presented here, obtained using such right-angle integrated sample cells, clearly demonstrate the ability to characterize very small features in objects, down to of order 100nm, including their use for dry, wet and even liquid samples. |
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Bibliography: | ObjectType-Article-1 SourceType-Scholarly Journals-1 ObjectType-Feature-2 content type line 23 |
ISSN: | 1094-4087 1094-4087 |
DOI: | 10.1364/OE.14.007889 |