Design of a 200 kV Focused Ion Beam Surface Analysis System

A nanometer nondestructive three-dimensional Rutherford back scattering (RBS) and medium energy ion scattering (MEIS) analysis system with a compact 200 kV focused ion beam (FIB) column has been designed. A high-vacuum sample chamber with a six-axis goniometer and an electrostatic toroidal analyzer...

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Bibliographic Details
Published inJapanese Journal of Applied Physics Vol. 31; no. 12S; p. 4537
Main Authors Mimura, Ryoh, Sawaragi, Hiroshi, Takai, Ryuso Aihara
Format Journal Article
LanguageEnglish
Published 01.12.1992
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Summary:A nanometer nondestructive three-dimensional Rutherford back scattering (RBS) and medium energy ion scattering (MEIS) analysis system with a compact 200 kV focused ion beam (FIB) column has been designed. A high-vacuum sample chamber with a six-axis goniometer and an electrostatic toroidal analyzer for channeling and RBS analysis are connected to the acceleration column. A minimum beam spot size of less than 50 nm with a current of 50 pA is estimated by calculation for a 400 keV Be ++ ion beam. As compared with MeV proton or helium ion microprobes, this compact system can produce about 10 times finer microprobes, 900-1600 times larger scattering cross section and higher depth resolution.
ISSN:0021-4922
1347-4065
DOI:10.1143/JJAP.31.4537