The Research of Micromachined Gas Pendulum Accelerometer’s Structure

With the micromachining technology, two perpendicular cavities are formed on a silicon substrate, and two thermistors whose resistances are equal are placed parallel in each cavity. The nature convention of the gas is produced by the thermistors which are used as both the heater and the sensitive el...

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Bibliographic Details
Published inApplied Mechanics and Materials Vol. 20-23; no. Information Technology for Manufacturing Systems; pp. 7 - 10
Main Authors Zhao, Qi Feng, Zhang, Fu Xue, Zhang, Wei, Yue, Ping
Format Journal Article
LanguageEnglish
Published Zurich Trans Tech Publications Ltd 01.01.2010
Subjects
Acceleration
Accelerometers
Heating equipment
Holes
Micromachining
Micromechanics
Silicon substrates
Thermistors
Airflow
Accelerometer
Micro Machine
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Summary:With the micromachining technology, two perpendicular cavities are formed on a silicon substrate, and two thermistors whose resistances are equal are placed parallel in each cavity. The nature convention of the gas is produced by the thermistors which are used as both the heater and the sensitive element in the hermetic cavity, and the acceleration can be measured with the temperature difference sensed by the thermistors. At last the test about the sensor shows when the value of acceleration is at the range of ±7g, the non-linearity is less than 0.62%FS.
Bibliography:Selected, peer reviewed papers from the 2010 International Conference on Information Technology for Manufacturing Systems (ITMS 2010), Macao, China, Jan. 30-31, 2010
ObjectType-Article-2
SourceType-Scholarly Journals-1
ObjectType-Feature-1
content type line 23
ISBN:0878492879
9780878492879
ISSN:1660-9336
1662-7482
1662-7482
DOI:10.4028/www.scientific.net/AMM.20-23.7