A novel elastomer-based magnetoresistive accelerometer

In this paper, we present a novel type of biaxial accelerometer based on a polydimethylsiloxane (PDMS) structure as the mass–spring system and using magnetoresistive (MR) sensors as the detection method. The proof mass of the sensor is a mushroom-shaped polymer magnet made of PDMS filled with perman...

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Published inSensors and actuators. A. Physical. Vol. 145-146; pp. 109 - 115
Main Authors Phan, K.L., Mauritz, A., Homburg, F.G.A.
Format Journal Article
LanguageEnglish
Published Elsevier B.V 01.07.2008
Subjects
Accelerometer
Magnetoresistive sensor
Polydimethylsiloxane
Accelerometer
Polydimethylsiloxane
Magnetoresistive sensor
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Summary:In this paper, we present a novel type of biaxial accelerometer based on a polydimethylsiloxane (PDMS) structure as the mass–spring system and using magnetoresistive (MR) sensors as the detection method. The proof mass of the sensor is a mushroom-shaped polymer magnet made of PDMS filled with permanent magnet powder, whose minute movement under lateral acceleration is precisely sensed by a set of MR sensors. The device aims at consumer electronics applications of low g range and low frequency, such as inclination measurements and motion sensing. An experimental device has been successfully fabricated which showed a linear transfer curve without significant hysteresis. A sensitivity of 0.32mV/(Vg) was obtained.
Bibliography:SourceType-Scholarly Journals-2
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ISSN:0924-4247
1873-3069
DOI:10.1016/j.sna.2007.10.055