A micro-LC-resonator fabricated by MEMS technique for high-frequency sensor applications

• Published in: Sensors and actuators. A. Physical. Vol. 135; no. 2; pp. 547 - 551
• Main Authors: Le, Anh-Tuan, Cho, Wan-Shik, Kim, Yong-Seok, Lee, Jeong-Bong, Kim, Chong-Oh, Lee, Heebok
• Format: Journal Article
• Language: English
• Published: Elsevier B.V 15.04.2007
• Subjects: Amorphous microwire; High frequency; LC-resonator; MEMS; Microinductor; Sensor applications; MEMS; Microinductor; LC-resonator; Amorphous microwire; High frequency; Sensor applications
• ISSN: 0924-4247; 1873-3069
• DOI: 10.1016/j.sna.2006.10.023

A novel magnetic LC-resonator for micromagnetic sensor devices was fabricated by means of microelectromechanical system (MEMS) technique. The micro-LC-resonator consists of a solenoidal microinductor with a bundle of annealed soft magnetic Co83.2B3.3Si5.9Mn7.6 microwires as microcore and a capacitor connected in parallel to the microinductor. The dimensions of solenoidal microinductors fabricated by MEMS technique were 500–1000μm in length with 10–20 turns. Because the permeability of the microcore is changing rapidly as a function of external magnetic field, the inductance of the microinductors can change drastically according to the external magnetic field. Therefore, the resonance frequency as well as the impedance of a micro-LC-resonator can be sensitively altered as the external magnetic field changes. The maximum magnetoimpedance ratio value for a micro-LC-resonator was reached as much as 500%. The impedance change of the LC-resonator can be greatly enhanced by selecting operating frequencies at near the resonance frequency.