Detection of graphene microelectromechanical system resonance

We present an experimental setup for fast detection of resonances of graphene microelectromechanical structures of different quality. The relatively simple technique used to read-out of the resonance frequency is the main advantage of the proposed system. The resolution is good enough to detect vibr...

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Bibliographic Details
Published inJournal of applied physics Vol. 116; no. 22; p. 224510
Main Authors Wiesner, M., Lindvall, N., Yurgens, A.
Format Journal Article
LanguageEnglish
Published Melville American Institute of Physics 14.12.2014
Subjects
Applied physics
Graphene
Microelectromechanical systems
microsensors
Q factors
Q-factor
vibration measurement
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Summary:We present an experimental setup for fast detection of resonances of graphene microelectromechanical structures of different quality. The relatively simple technique used to read-out of the resonance frequency is the main advantage of the proposed system. The resolution is good enough to detect vibrations of the graphene resonator with the quality factor of ∼24 and resonance frequency of 104 MHz.
ISSN:0021-8979
1089-7550
1089-7550
DOI:10.1063/1.4903987