Design and performance of a recessed thin film inductive transducer

• Published in: IEEE transactions on magnetics Vol. 32; no. 1; pp. 74 - 79
• Main Authors: Zak, B.S., Curland, N., Giusti, J.H., Ash, K.P., Cameron, G.P.
• Format: Journal Article Conference Proceeding
• Language: English
• Published: New York, NY IEEE 01.01.1996; Institute of Electrical and Electronics Engineers
• Subjects: Applied sciences; Coils; Electronics; Exact sciences and technology; Geometry; Magnetic devices; Magnetic heads; Magnetic separation; Magnetic thin film devices: magnetic heads (magnetoresistive, inductive, etc.); domain-motion devices, etc; Resists; Scanning electron microscopy; Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices; Solid modeling; Surfaces; Transducers; Transistors; Design; Thin films; Finite element method; Thin film device; Winding; Microelectronic fabrication; Transducers; Theoretical study; Inductive transducer; Magnetic device; Modeling
• ISSN: 0018-9464; 1941-0069
• DOI: 10.1109/20.477553

An improved inductive transducer is achieved by placing the coil and the majority of the transducer body into a recessed alumina basecoat. Process advantages of a recessed over planar structure includes lower top pole topography, improved pole trim capability, and improved top pole composition uniformity. Coil and photoresist processing in a recessed cavity allows for multiple layers with lower resistance without increasing transducer Permalloy path length. Recessed trimmed design performance has increased efficiency with higher amplitude and a narrower pulse width along with improved overwrite compared to planar untrimmed transducers. The recessed basecoat design is explained, and compared to planar transducers using modeling and performance results.