A novel approach to correction of optical aberrations in laser scanning microscopy for surface metrology

In this paper, we present the design and construction of a laser scanning microscope for surface metrology. The proposed system is designed for using simple uncompensated optics in order to reduce the overall costs and the weight of the movable focusing optics, therefore improving measurement speed...

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Bibliographic Details
Published inMeasurement science & technology Vol. 23; no. 7; pp. 74009 - 1-8
Main Authors Ginani, L S, Theska, R
Format Journal Article
LanguageEnglish
Published IOP Publishing 01.07.2012
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