A novel approach to correction of optical aberrations in laser scanning microscopy for surface metrology

• Published in: Measurement science & technology Vol. 23; no. 7; pp. 74009 - 1-8
• Main Authors: Ginani, L S, Theska, R
• Format: Journal Article
• Language: English
• Published: IOP Publishing 01.07.2012
• Subjects: Aberration; Dynamical systems; Dynamics; error correction; focus variation; Focusing; laser scanning; Lasers; Metrology; Miniaturization; optical aberrations; surface metrology; Weight reduction

In this paper, we present the design and construction of a laser scanning microscope for surface metrology. The proposed system is designed for using simple uncompensated optics in order to reduce the overall costs and the weight of the movable focusing optics, therefore improving measurement speed...