A novel approach to correction of optical aberrations in laser scanning microscopy for surface metrology

In this paper, we present the design and construction of a laser scanning microscope for surface metrology. The proposed system is designed for using simple uncompensated optics in order to reduce the overall costs and the weight of the movable focusing optics, therefore improving measurement speed...

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Bibliographic Details
Published inMeasurement science & technology Vol. 23; no. 7; pp. 74009 - 1-8
Main Authors Ginani, L S, Theska, R
Format Journal Article
LanguageEnglish
Published IOP Publishing 01.07.2012
Subjects
Aberration
Dynamical systems
Dynamics
error correction
focus variation
Focusing
laser scanning
Lasers
Metrology
Miniaturization
optical aberrations
surface metrology
Weight reduction
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Summary:In this paper, we present the design and construction of a laser scanning microscope for surface metrology. The proposed system is designed for using simple uncompensated optics in order to reduce the overall costs and the weight of the movable focusing optics, therefore improving measurement speed and system dynamics and offering the possibility of system miniaturization. In order to overcome the effects of optical aberrations in the system caused by the use of simple optics, a new approach is proposed, where the effects of these aberrations in the measurements are computationally corrected.
Bibliography:ObjectType-Article-2
SourceType-Scholarly Journals-1
ObjectType-Feature-1
content type line 23
ISSN:0957-0233
1361-6501
DOI:10.1088/0957-0233/23/7/074009