Initial stages of Fe chemical vapor deposition onto Si(100)

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Bibliographic Details
Published inPhysical review letters Vol. 74; no. 25; p. 5088
Main Authors Adams, DP, Tedder, LL, Mayer, TM, Swartzentruber, BS, Chason, E
Format Journal Article
LanguageEnglish
Published United States 19.06.1995
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ISSN:1079-7114
DOI:10.1103/PhysRevLett.74.5088