Full-field microimaging with 8 keV X-rays achieves a spatial resolutions better than 20 nm

Fresnel zone plates (450 nm thick Au, 25 nm outermost zone width) used as objective lenses in a full field transmission reached a spatial resolution better than 20 nm and 1.5% efficiency with 8 keV photons. Zernike phase contrast was also realized without compromising the resolution. These are very...

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Bibliographic Details
Published inOptics express Vol. 19; no. 21; pp. 19919 - 19924
Main Authors Chen, Tsung-Yu, Chen, Yu-Tung, Wang, Cheng-Liang, Kempson, Ivan M, Lee, Wah-Keat, Chu, Yong S, Hwu, Y, Margaritondo, G
Format Journal Article
LanguageEnglish
Published United States 10.10.2011
Subjects
Electrochemistry - methods
Electrons
Equipment Design
Gold - chemistry
Lenses
Metal Nanoparticles - chemistry
Microscopy, Electron, Transmission - methods
Microscopy, Phase-Contrast - methods
Optical Devices
Optics and Photonics - methods
Photons
X-Rays
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Summary:Fresnel zone plates (450 nm thick Au, 25 nm outermost zone width) used as objective lenses in a full field transmission reached a spatial resolution better than 20 nm and 1.5% efficiency with 8 keV photons. Zernike phase contrast was also realized without compromising the resolution. These are very significant achievements in the rapid progress of high-aspect-ratio zone plate fabrication by combined electron beam lithography and electrodeposition.
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ISSN:1094-4087
1094-4087
DOI:10.1364/OE.19.019919