The Evaluation and Research of white light interference profiler about the measurement uncertainty

The optical resolution of the white light interferometer characterized by higher sensitively and accurately with 580nm wavelength approximately is 5nm. However, as a new non-contact measurement equipment, the white light interferometer has certain measurement errors. In this paper, we propose a nove...

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Bibliographic Details
Published inJournal of physics. Conference series Vol. 1654; no. 1; pp. 12100 - 12109
Main Authors Hu, Chang'an, Tang, Yan, Sun, Haifeng, Liu, Lei, Hu, Song
Format Journal Article
LanguageEnglish
Published Bristol IOP Publishing 01.10.2020
Subjects
Evaluation
Fourier transforms
Interference
Interferometers
Phase modulation
Physics
Splicing
Uncertainty
White light
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Summary:The optical resolution of the white light interferometer characterized by higher sensitively and accurately with 580nm wavelength approximately is 5nm. However, as a new non-contact measurement equipment, the white light interferometer has certain measurement errors. In this paper, we propose a novel method that the accuracy of the white light interference profiler is evaluated by measuring the nano grating standard structure. The standard step height and pitch sample were used in the measurement process, and the morphological characteristics of the sample were obtained by Fourier transform, phase modulation and phase splicing of the sampled data. The experimental results show that the horizontal and vertical extension uncertainty of the white light interference profiler is 174nm and 8.07nm, respectively.
ISSN:1742-6588
1742-6596
DOI:10.1088/1742-6596/1654/1/012100