Analytical electron microscope based on scanning transmission electron microscope with wavelength dispersive x-ray spectroscopy to realize highly sensitive elemental imaging especially for light elements

• Published in: Measurement science & technology Vol. 28; no. 1; pp. 15904 - 15912
• Main Authors: Koguchi, Masanari, Tsuneta, Ruriko, Anan, Yoshihiro, Nakamae, Koji
• Format: Journal Article
• Language: English
• Published: IOP Publishing 01.01.2017
• Subjects: boron; drift-free system; multi-capillary x-rays lens; p-type MOS transistor; STEM-WDX
• ISSN: 0957-0233; 1361-6501
• DOI: 10.1088/1361-6501/28/1/015904

An analytical electron microscope based on the scanning transmission electron microscope with wavelength dispersive x-ray spectroscopy (STEM-WDX) to realize highly sensitive elemental imaging especially for light elements has been developed. In this study, a large-solid-angle multi-capillary x-rays lens with a focal length of 5 mm, long-time data acquisition (e.g. longer than 26 h), and a drift-free system made it possible to visualize boron-dopant images in a Si substrate at a detection limit of 0.2 atomic percent.