Characterization of periodic extreme ultraviolet multilayer based on multi-objective evolutionary algorithm

In order to refine the layered structure of extreme ultraviolet multilayers, a multi-objective evolutionary algorithm which is post-hybridized with the standard Levenberg-Marquardt algorithm is applied to analyze the grazing incidence X-ray reflectivity (GIXR) and the normal incidence extreme ultrav...

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Bibliographic Details
Published inJournal of applied physics Vol. 122; no. 18
Main Authors Kuang, Shang-qi, Gong, Xue-peng, Yang, Hai-gui
Format Journal Article
LanguageEnglish
Published Melville American Institute of Physics 14.11.2017
Subjects
Evolutionary algorithms
Genetic algorithms
Incidence
Multilayers
Multiple objective analysis
Reflectance
Ultraviolet reflection
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Summary:In order to refine the layered structure of extreme ultraviolet multilayers, a multi-objective evolutionary algorithm which is post-hybridized with the standard Levenberg-Marquardt algorithm is applied to analyze the grazing incidence X-ray reflectivity (GIXR) and the normal incidence extreme ultraviolet reflectance (EUVR). In this procedure, the GIXR data and EUVR data are simultaneously fitted as two objectives, and the high sensitivities of these two sets of data to layer thicknesses and densities are combined. This set of mathematical procedures is conducive to obtain a more correct model of periodic multilayers which can simultaneously describe both GIXR and EUVR measurements. As a result, the layered structure of Mo/Si multilayers with a period of about 7.0 nm is obtained.
ISSN:0021-8979
1089-7550
DOI:10.1063/1.4995806