Synthesis of nanocrystalline titanium dioxide films in a cylindrical magnetron-type gas discharge and their optical characterization

The plasma-dynamic and spectral characteristics of a cylindrical magnetron-type gas discharge are studied experimentally. The radiation spectrum of the plasma is recorded in real time in the range 350–820 nm. Appropriate conditions for synthesis of TiO 2 binary compound are found. They are provided...

Full description

Saved in:
Bibliographic Details
Published inTechnical physics Vol. 55; no. 8; pp. 1200 - 1208
Main Authors Goncharov, A. A., Evsyukov, A. N., Kostin, E. G., Stetsenko, B. V., Frolova, E. K., Shchurenko, A. I.
Format Journal Article
LanguageEnglish
Published Dordrecht SP MAIK Nauka/Interperiodica 01.08.2010
Springer
Subjects
Classical and Continuum Physics
Electron and Ion Emission
Optical properties
Physics
Physics and Astronomy
Plasma physics
Surface
Titanium dioxide
Titanium Atom
Band Absorption Edge
Discharge Voltage
Oxygen Flow Rate
Oxygen Line
Online AccessGet full text

Cover

More Information
Summary:The plasma-dynamic and spectral characteristics of a cylindrical magnetron-type gas discharge are studied experimentally. The radiation spectrum of the plasma is recorded in real time in the range 350–820 nm. Appropriate conditions for synthesis of TiO 2 binary compound are found. They are provided by maintaining the intensities of the spectral lines of reactants and a plasma-forming gas at a desired level. The feasibility of monitoring the TiO 2 film synthesis conditions from the spectral characteristics of the discharge plasma and from the variation of the discharge voltage is considered. Ellipsometric and spectral data for nanocrystalline titanium dioxide films indicate that the refractive index of the film depends on its thickness.
ISSN:1063-7842
1090-6525
DOI:10.1134/S1063784210080207