High Speed Pulse Measurement of Micro Ferroelectric Capacitors Using a Multi-Probe Atomic Force Microscope

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Bibliographic Details
Published inJapanese Journal of Applied Physics Vol. 47; no. 6R; p. 4638
Main Authors Kin, Nobuhiro, Takai, Kazuaki, Honda, Koichiro
Format Journal Article
LanguageEnglish
Published 01.06.2008
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ISSN:0021-4922
1347-4065
DOI:10.1143/JJAP.47.4638