Effect of Zinc Oxide Film Deposition Position on the Characteristics of Zinc Oxide Thin Film Transistors Fabricated by Low-Temperature Magnetron Sputtering

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Bibliographic Details
Published inJapanese Journal of Applied Physics Vol. 47; no. 9R; p. 7122
Main Authors Takechi, Kazushige, Nakata, Mitsuru, Eguchi, Toshimasa, Otsuki, Shigeyoshi, Yamaguchi, Hirotaka, Kaneko, Setsuo
Format Journal Article
LanguageEnglish
Published 01.09.2008
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ISSN:0021-4922
1347-4065
DOI:10.1143/JJAP.47.7122