Design, Modeling, and Closed-Loop Control of a Complementary Clamp Piezoworm Stage

• Published in: IEEE/ASME transactions on mechatronics Vol. 14; no. 6; pp. 724 - 732
• Main Authors: Salisbury, S.P., Ben Mrad, R., Waechter, D.F., Prasad, S.E.
• Format: Journal Article
• Language: English
• Published: New York IEEE 01.12.2009; The Institute of Electrical and Electronics Engineers, Inc. (IEEE)
• Subjects: Assessments; Backlash; Bioinformatics; Clamps; Complementary; control; Flexing; Frames; Genomics; Hydraulic actuators; Joints; Kinematics; Mechanical sensors; Micrometers; Nanoelectromechanical systems; Piezoelectric actuators; piezoworm; precision; Size control; stage; Tracking; Voltage
• ISSN: 1083-4435; 1941-014X
• DOI: 10.1109/TMECH.2008.2009992

A novel complementary clamp piezoworm stage was developed to be integrated into a two-axis configuration for tracking profiles in different size regimes. It is based on novel clamp designs that permit complementary action using the same flexure frame in a compact arrangement. A novel direct connection to a commercial slide was used to eliminate backlash and the need for high-precision alignment of a rod and slide. A model was developed and used to design the controller structure and choose thresholds for smooth operation. Complete assessment of the closed-loop performance of a single-axis and dual-axis stage in different regimes was done. The average positioning accuracy of the stage was plusmn20 nm. For tracking applications, the average error of the two-axis stage was 8 nm in the nanometer regime, 1.72 mum in the micrometer regime, and 1.85 mum in the millimeter regime.