Low-loss Silicon Oxynitride Waveguides and Branches for the 850-nm-Wavelength Region

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Bibliographic Details
Published inJapanese Journal of Applied Physics Vol. 47; no. 8S1; p. 6739
Main Authors Tsuchizawa, Tai, Watanabe, Toshifumi, Yamada, Koji, Fukuda, Hiroshi, Itabashi, Seiichi, Fujikata, Junichi, Gomyo, Akiko, Ushida, Jun, Okamoto, Daisuke, Nishi, Kenichi, Ohashi, Keishi
Format Journal Article
LanguageEnglish
Published 01.08.2008
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ISSN:0021-4922
1347-4065
DOI:10.1143/JJAP.47.6739