New Growth Method of ZnO Nanostructures Using Sputter Machines without Heat Treatment
New shapes of ZnO nanostructures formed using radio-frequency sputter deposition are revealed for the first time. The effects of growth conditions, such as O 2 /Ar ratio, growth time and metal surface, on the shapes of ZnO are investigated. ZnO clusters grown on the surface of polycrystalline metal...
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Published in | Japanese Journal of Applied Physics Vol. 45; no. 11R; p. 8957 |
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Main Authors | , , |
Format | Journal Article |
Language | English |
Published |
01.11.2006
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Online Access | Get full text |
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