New Growth Method of ZnO Nanostructures Using Sputter Machines without Heat Treatment
New shapes of ZnO nanostructures formed using radio-frequency sputter deposition are revealed for the first time. The effects of growth conditions, such as O 2 /Ar ratio, growth time and metal surface, on the shapes of ZnO are investigated. ZnO clusters grown on the surface of polycrystalline metal...
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| Published in | Japanese Journal of Applied Physics Vol. 45; no. 11R; p. 8957 |
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| Main Authors | , , |
| Format | Journal Article |
| Language | English |
| Published |
01.11.2006
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| Online Access | Get full text |
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| Summary: | New shapes of ZnO nanostructures formed using radio-frequency sputter deposition are revealed for the first time. The effects of growth conditions, such as O
2
/Ar ratio, growth time and metal surface, on the shapes of ZnO are investigated. ZnO clusters grown on the surface of polycrystalline metal particles were found to be amorphous and had polycrystalline structures. The crystallinity and preferred growth direction of ZnO were promoted with increasing O
2
/Ar ratio and growth time. The atomic percent of oxygen in ZnO increased and oxygen excess occurred with increasing O
2
/Ar ratio and growth time. Two distinct ZnO shapes were observed on Cu/Ti/Si and Cu/Au/Si surfaces, but were not observed on Ti/Si surface. |
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| ISSN: | 0021-4922 1347-4065 |
| DOI: | 10.1143/JJAP.45.8957 |