New Growth Method of ZnO Nanostructures Using Sputter Machines without Heat Treatment
New shapes of ZnO nanostructures formed using radio-frequency sputter deposition are revealed for the first time. The effects of growth conditions, such as O 2 /Ar ratio, growth time and metal surface, on the shapes of ZnO are investigated. ZnO clusters grown on the surface of polycrystalline metal...
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| Published in | Japanese Journal of Applied Physics Vol. 45; no. 11R; p. 8957 |
|---|---|
| Main Authors | , , |
| Format | Journal Article |
| Language | English |
| Published |
01.11.2006
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| Online Access | Get full text |
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| Abstract | New shapes of ZnO nanostructures formed using radio-frequency sputter deposition are revealed for the first time. The effects of growth conditions, such as O
2
/Ar ratio, growth time and metal surface, on the shapes of ZnO are investigated. ZnO clusters grown on the surface of polycrystalline metal particles were found to be amorphous and had polycrystalline structures. The crystallinity and preferred growth direction of ZnO were promoted with increasing O
2
/Ar ratio and growth time. The atomic percent of oxygen in ZnO increased and oxygen excess occurred with increasing O
2
/Ar ratio and growth time. Two distinct ZnO shapes were observed on Cu/Ti/Si and Cu/Au/Si surfaces, but were not observed on Ti/Si surface. |
|---|---|
| AbstractList | New shapes of ZnO nanostructures formed using radio-frequency sputter deposition are revealed for the first time. The effects of growth conditions, such as O
2
/Ar ratio, growth time and metal surface, on the shapes of ZnO are investigated. ZnO clusters grown on the surface of polycrystalline metal particles were found to be amorphous and had polycrystalline structures. The crystallinity and preferred growth direction of ZnO were promoted with increasing O
2
/Ar ratio and growth time. The atomic percent of oxygen in ZnO increased and oxygen excess occurred with increasing O
2
/Ar ratio and growth time. Two distinct ZnO shapes were observed on Cu/Ti/Si and Cu/Au/Si surfaces, but were not observed on Ti/Si surface. |
| Author | Youn, Doo-Hyeb Kang, Kwang-Yong Maeng, Sung-Lyul |
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| CitedBy_id | crossref_primary_10_1016_j_tsf_2011_08_072 crossref_primary_10_7567_JJAP_52_11NJ13 |
| Cites_doi | 10.1016/j.jcrysgro.2004.07.009 10.1088/0957-4484/17/3/007 10.1016/S0042-207X(98)00257-7 10.1016/S0040-6090(99)00060-7 10.1016/S0925-8388(03)00247-0 10.1016/j.materresbull.2005.07.038 10.1063/1.1662307 10.1016/0022-0248(85)90064-8 10.1016/S0040-6090(96)09568-5 10.1016/0022-0248(93)90861-P |
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| References | 1997; 302 1993; 130 2006; 41 1985; 71 1973; 44 1999; 348 2003; 356 1998; 51 2006; 17 2004; 270 2006; 48 |
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