A Novel Fabrication Method for Forming Inclined Groove-Based Microstructures Using Optical Elements

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Bibliographic Details
Published inJapanese Journal of Applied Physics Vol. 47; no. 6S; p. 5287
Main Authors Huang, Ying-Jui, Chang, Tien-Li, Chou, Hwai-Pwu, Lin, Cheng-Hsuan
Format Journal Article
LanguageEnglish
Published 01.06.2008
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ISSN:0021-4922
1347-4065
DOI:10.1143/JJAP.47.5287