Pseudo-Single-Nucleus Lateral Crystallization of Si Thin Films

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Bibliographic Details
Published inJapanese Journal of Applied Physics Vol. 47; no. 3S; p. 1862
Main Authors Endo, Takahiko, Taniguchi, Yukio, Katou, Tomoya, Shimoto, Shigeyuki, Ohno, Takashi, Azuma, Kazufumi, Matsumura, Masakiyo
Format Journal Article
LanguageEnglish
Published 01.03.2008
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ISSN:0021-4922
1347-4065
DOI:10.1143/JJAP.47.1862