Crack-free TiO2 films prepared by adjusting processing parameters via liquid phase deposition technique

TiO 2 thin films with controllable morphology and grain size were prepared via a liquid phase deposition (LPD) technique. The effects of the processing parameters including the (NH 4 ) 2 TiF 6 concentration, solution pH, and (NH 4 ) 2 TiF 6 :H 3 BO 3 molar ratio on the grain size and morphology of t...

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Published inHanʼguk Seramik Hakhoe chi Vol. 57; no. 2; pp. 206 - 212
Main Authors Li, Jie, Xu, Hai-Yan, Wang, Ai-Guo, Zhang, Feng-Jun, Sun, Dao-Sheng, Oh, Won-Chun
Format Journal Article
LanguageEnglish
Published Singapore Springer Singapore 01.03.2020
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Summary:TiO 2 thin films with controllable morphology and grain size were prepared via a liquid phase deposition (LPD) technique. The effects of the processing parameters including the (NH 4 ) 2 TiF 6 concentration, solution pH, and (NH 4 ) 2 TiF 6 :H 3 BO 3 molar ratio on the grain size and morphology of the films were investigated. The prepared samples were characterized by X-ray diffraction, scanning electron microscopy, and ultraviolet–visible spectroscopy. The results showed that the deposition parameters significantly affected the growth and nucleation velocities of the crystalline grains, which resulted in the formation of TiO 2 films with different morphologies and grain sizes. The capillary stress among the grains of the film, which resulted in the cracking of the film, depended on the size of the grains. Thus, the cracking of the LPD-derived TiO 2 films could be mitigated by adjusting the deposition parameters.
ISSN:1229-7801
2234-0491
DOI:10.1007/s43207-020-00019-y