Optical-thermally actuated graphene mechanical resonator for humidity sensing
This paper demonstrates an optical-thermally actuated multi-layer graphene resonator for humidity sensing. A ∼10-layered graphene resonator with a diameter of 125 µm peripherally clamped on the fiber ferrule end face was actuated to vibrate using the intensity-modulated laser, and the vibration was...
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Published in | Sensors and actuators. B, Chemical Vol. 374; p. 132851 |
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Main Authors | , , , , |
Format | Journal Article |
Language | English |
Published |
Lausanne
Elsevier B.V
01.01.2023
Elsevier Science Ltd |
Subjects | |
Online Access | Get full text |
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Summary: | This paper demonstrates an optical-thermally actuated multi-layer graphene resonator for humidity sensing. A ∼10-layered graphene resonator with a diameter of 125 µm peripherally clamped on the fiber ferrule end face was actuated to vibrate using the intensity-modulated laser, and the vibration was detected based on the optical fiber Fabry-Perot interference method. The humidity sensing experiment exhibited an up to 350 Hz/%RH humidity sensitivity in the range of 0–100 % RH at 25 °C, which was 10 times higher than those of the previously reported Quartz Crystal Microbalance (QCM)-based humidity sensors. Also, a good repeatability of the frequency-humidity response was observed for the presented graphene resonator. Moreover, in view of the coupling effect of temperature on the graphene resonator, the temperature drift of 0.942 kHz/°C was measured in the range of 25–50 °C, thereby inducing an absolute humidity error of about 0.6 g/(m3·°C).
•Micro fiber-optic graphene resonators are fabricated and used for humidity sensing innovatively.•Graphene resonators exhibit a much higher humidity sensitivity of 350 Hz/%RH compared with the Quartz Crystal Microbalance.•The humidity response of the graphene resonators shows the good linearity and stability at atmospheric pressure. |
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ISSN: | 0925-4005 1873-3077 |
DOI: | 10.1016/j.snb.2022.132851 |