Flexible Pd-WS2/Si heterojunction sensors for highly sensitive detection of hydrogen at room temperature

•Flexible sensors were fabricated through the deposition of Pd-WS2 layers on u-Si.•The sensor exhibited excellent H2 sensing performance with an ultrahigh sensitivity.•High flexibility, durability, selectivity and stability were shown in the sensors. Flexible sensor devices were fabricated through t...

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Published inSensors and actuators. B, Chemical Vol. 283; pp. 740 - 748
Main Authors Hao, Lanzhong, Liu, Hui, Xu, Hanyang, Dong, Shichang, Du, Yongjun, Wu, Yupeng, Zeng, Huizhong, Zhu, Jun, Liu, Yunjie
Format Journal Article
LanguageEnglish
Published Lausanne Elsevier B.V 15.03.2019
Elsevier Science Ltd
Subjects
Chemical sensors
Flexible
Flexible components
Heterojunction
Heterojunctions
Hydrogen
Interface
Magnetron sputtering
Room temperature
Selectivity
Sensor
Sensors
Stability analysis
Thickness
Thin films
Transition metal disulfide
Tungsten disulfide
Flexible
Interface
Transition metal disulfide
Heterojunction
Sensor
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Summary:•Flexible sensors were fabricated through the deposition of Pd-WS2 layers on u-Si.•The sensor exhibited excellent H2 sensing performance with an ultrahigh sensitivity.•High flexibility, durability, selectivity and stability were shown in the sensors. Flexible sensor devices were fabricated through the deposition of layered tungsten disulfide (WS2) thin films on ultrathin Si by using magnetron sputtering technique and a 3-nm-thickness Pd layer was covered on the device surface to perform the room-temperature detection of hydrogen. The flexible Pd-WS2/Si heterojunctions exhibited excellent sensitive characteristics to hydrogen in a large range of 0.1%–4.0%. By tuning the layer number (nL) of the WS2 films, a high response up to 19.8, fast response and recovery speeds were achieved when n = 5, respectively. The performance was much better than the values for other reported flexible hydrogen sensors based on single 2D nanosheets. The sensing characteristics were further evaluated under bending conditions, revealing their significantly high flexibility, durability, stability as well as good selectivity. This work paves the way to develop high-performance flexible Pd-WS2/Si sensors for hydrogen detection at room temperature.
ISSN:0925-4005
1873-3077
DOI:10.1016/j.snb.2018.12.062