Vertical Optical Coupling Structure Based on Polymer for Small Size and High-Speed Photodetectors
This letter presents a new collective and passive thin-film 3D vertical optical coupling structure, which is fabricated based on SU-8 polymer. This technology compensates for the alignment errors of the present passive optical coupling solutions. The structure is collectively manufactured on a matri...
Saved in:
Published in | IEEE photonics technology letters Vol. 30; no. 21; pp. 1886 - 1889 |
---|---|
Main Authors | , , , , , , , |
Format | Journal Article |
Language | English |
Published |
New York
IEEE
01.11.2018
The Institute of Electrical and Electronics Engineers, Inc. (IEEE) Institute of Electrical and Electronics Engineers |
Subjects | |
Online Access | Get full text |
Cover
Loading…
Summary: | This letter presents a new collective and passive thin-film 3D vertical optical coupling structure, which is fabricated based on SU-8 polymer. This technology compensates for the alignment errors of the present passive optical coupling solutions. The structure is collectively manufactured on a matrix of small-sized photodiodes on wafer level to vertically couple with a single-mode optical fiber. The proposed structure shows a coupling efficiency between the 10-<inline-formula> <tex-math notation="LaTeX">\mu \text{m} </tex-math></inline-formula> active area diameter photodetector and single-mode fiber of 94% and a 1-dB alignment tolerance of <inline-formula> <tex-math notation="LaTeX">\pm 9~\mu \text{m} </tex-math></inline-formula> at 1550 nm. Its wafer-level mass-production capability and manufacturing process simplicity make this novel coupling approach a potential solution for short- and long-range optical communication applications. |
---|---|
ISSN: | 1041-1135 1941-0174 |
DOI: | 10.1109/LPT.2018.2871268 |