Study of a WO3 thin film based hydrogen gas sensor decorated with platinum nanoparticles

• Published in: Sensors and actuators. B, Chemical Vol. 317; p. 128145
• Main Authors: Chang, Ching-Hong, Chou, Tzu-Chieh, Chen, Wei-Cheng, Niu, Jing-Shiuan, Lin, Kun-Wei, Cheng, Shiou-Ying, Tsai, Jung-Hui, Liu, Wen-Chau
• Format: Journal Article
• Language: English
• Published: Lausanne Elsevier B.V 15.08.2020; Elsevier Science Ltd
• Subjects: Algorithm; Gas sensors; Grain size; Hydrogen; Hydrogen sensing; Internet of Things; Interpolation; Metal oxides; Nanoparticles; Platinum; Pt Nanoparticles (NPs); RTE; SMOs; Thin films; Tungsten oxides; WO3; SMOs; Hydrogen sensing; RTE; WO3; Algorithm; Pt Nanoparticles (NPs)
• ISSN: 0925-4005; 1873-3077
• DOI: 10.1016/j.snb.2020.128145

[Display omitted] •Pt NPs are evaporated by a rapid thermal evaporation method.•Hydrogen sensing characteristics of RTE-Pt NP/WO3 device are comprehensively studied.•Excellent hydrogen sensing response of 1.41×106 is obtained under 1% H2/air gas at 200 °C.•A lower detection limit of 1 ppm H2/air is obtained.•FOD and SPPCI algorithms are employed to filter (restore) the redundant (reduced) data. A simple platinum nanoparticle (Pt NP)/WO3 semiconducting metal oxide (SMO)-based structure is fabricated and completely studied as a hydrogen gas sensor. In this work, simple rapid thermal evaporation (RTE) was employed to fabricate Pt NPs. This approach could easily produce Pt NPs with a small grain size and uniformity on the WO3 thin film. Experimentally, at 200 °C, the studied device exhibited an excellent hydrogen sensing response of 1.41 × 106 (under a 1% H2/air gas), a very low detecting level of 1 ppm H2/air, and a relatively shorter response (recovery) time of 201 s (26) s. Moreover, first order differential (FOD) and shape-preserving piecewise cubic interpolation (SPPCI) were also employed to overcome the wireless transmission problem for the Internet of Things (IoTs). Furthermore, based on the thermodynamic analysis, the surface coverage performance was studied for this device. As the result, the studied device exhibited practically adsorption with hydrogen gas at 200 °C. The studied device is therefore promising for high-performance hydrogen sensing applications.