Microscale analysis and gas sensing characteristics based on SnO2 hollow spheres

• Published in: Microelectronic engineering Vol. 231; p. 111372
• Main Authors: Yuan, Zhenyu, Zuo, Kaiyuan, Meng, Fanli, Ma, Zhanwei, Xu, Weixiang, Dong, Hui
• Format: Journal Article
• Language: English
• Published: Amsterdam Elsevier B.V 15.07.2020; Elsevier BV
• Subjects: Computer simulation; Current density; Current distribution; Density; Density distribution; Diameters; Ethanol; Gas detectors; Gas sensors; Mathematical models; Nanospheres; Operating temperature; Optimization; Selectivity; Sensors; Simulation; SnO2 hollow spheres; Spherical shells simulation model; Tin dioxide; Two dimensional models; Spherical shells simulation model; SnO2 hollow spheres; Gas sensors
• ISSN: 0167-9317; 1873-5568
• DOI: 10.1016/j.mee.2020.111372

In this paper, the effects of hollow nanospheres diameter on gas sensing characteristics are studied by simulation and experimental method. Two-dimensional sensor model and hollow spheres material model are established to study the distribution of gas concentration, temperature and current density. Simulation results show that the diameter of nanospheres have a significant influence on the current density distribution, and both too large diameter and too small diameter will reduce sensor response. SnO2 hollow spheres with different diameters are fabricated for experimental verification. The experimental results agree with the simulation results. The size of the hollow spheres changes, the response of sensor, the optimal operating temperature, and the selectivity also change. Compared with 100 nm and 2000 nm, 500 nm hollow nanospheres sensor has higher selectivity and response value. The response is 43 for 100 ppm ethanol when the sensor operates at the optimum operating temperature. [Display omitted] •Effects of hollow nanospheres diameter on gas sensing characteristics are studied.•Two-dimensional sensor model and hollow spheres material model are established.•SnO2 hollow spheres are fabricated for experimental verification.•The experimental results agree with the simulation results.