Microanalyses on Mo films before and after hydrogen ion irradiation

• Published in: Surface and interface analysis Vol. 39; no. 12-13; pp. 937 - 941
• Main Authors: Liu, C. H., Huang, N. K., Wang, D. Z., Yang, B.
• Format: Journal Article
• Language: English
• Published: Chichester, UK John Wiley & Sons, Ltd 01.12.2007; Wiley
• Subjects: Condensed matter: structure, mechanical and thermal properties; Cross-disciplinary physics: materials science; rheology; Deposition by sputtering; Exact sciences and technology; hydrogen ion irradiation; Ion radiation effects; Materials science; Methods of deposition of films and coatings; film growth and epitaxy; Mo films; Physical radiation effects, radiation damage; Physics; Structure and morphology; thickness; Structure of solids and liquids; crystallography; Surfaces and interfaces; thin films and whiskers (structure and nonelectronic properties); Thin film structure and morphology; XPS; XRD; Scanning electron microscopy; Surface contamination; Hydrogen; Physical radiation effects; Mo films; XRD; Molybdenum; Stainless steels; Film growth; Ion beams; Surface structure; hydrogen ion irradiation; Thin films; Magnetrons; Cathode sputtering; Direct current; Transition elements; XPS; Argon; X-ray photoelectron spectra
• ISSN: 0142-2421; 1096-9918
• DOI: 10.1002/sia.2640

Molybdenum (Mo) thin films were deposited by direct current magnetron sputtering on stainless steel followed by argon ion bombardment. Samples were then irradiated by hydrogen ion beam with an energy of 10 keV and a dose of 1 × 1018 ions cm−2. In order to understand the effect of hydrogen ion irradiation on the films, SEM was used to observe the surface morphology of films. X‐ray diffraction spectra (XRD) and XPS were used for characterization of the chemical bonding states of Mo and O contamination on the surface of the Mo films before and after hydrogen ion irradiation. Infrared (IR) spectra were also used to study bonds of Mo, O, and H. The mechanism related to this phenomenon is suggested in this article. Copyright © 2007 John Wiley & Sons, Ltd.