H atom plasma diagnostics : a sensitive probe of temperature and purity
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Published in | Plasma chemistry and plasma processing Vol. 12; no. 1; pp. 89 - 101 |
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Main Authors | , , , , |
Format | Journal Article |
Language | English |
Published |
New York, NY
Springer
01.03.1992
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Subjects | |
Online Access | Get full text |
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ISSN: | 0272-4324 1572-8986 |
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DOI: | 10.1007/bf01447946 |