Construction of a New Flat Force Sensor Using the Resonant Frequency Shift by Axial Force

Saved in:
Bibliographic Details
Published inJapanese Journal of Applied Physics Vol. 41; no. Part 1, No. 5B; pp. 3433 - 3438
Main Authors Sugawara, Sumio, Takahashi, Jun, Tomikawa, Yoshiro
Format Journal Article
LanguageEnglish
Published 01.05.2002
Online AccessGet full text

Cover

More Information
ISSN:0021-4922
1347-4065
DOI:10.1143/JJAP.41.3433