Single Wavelength Blue-Laser Optical Head-Like Opto-Mechanical System for Turntable Thermal Mode Lithography and Stamper Fabrication

• Published in: IEEE transactions on magnetics Vol. 47; no. 3; pp. 701 - 705
• Main Authors: Yang, Chin-Tien, Chen, Chih-Yu, Huang, Chun-Chieh, Lee, Yuan-Chin, Chen, Shuen-Chen, Cheng, Chung-Ta
• Format: Journal Article
• Language: English
• Published: New York IEEE 01.03.2011; The Institute of Electrical and Electronics Engineers, Inc. (IEEE)
• Subjects: Beams (radiation); Blue-laser optical head; Control systems; Focusing; inorganic resist; Laser beams; Lithography; Magnetism; Measurement by laser beam; nano-scale pattern; Nanostructure; Offset printing; Power control; Resists; Semiconductor lasers; Servosystems; thermal mode lithography; Turntables; Wavelengths
• ISSN: 0018-9464; 1941-0069
• DOI: 10.1109/TMAG.2010.2101585

The characterization of novel small size 405 nm blue-laser optical head-like opto-mechanical system for turntable thermal mode lithography system that can provide high quality beam spot profile and real time high precision servo control and feasibility for thermal mode lithography process application are presented. The optical head-like opto-mechanical system consists of a single wavelength laser direct-write blue-laser opto-mechanical module and related servo control main board. An ideally narrow round shape exposure beam spot about 260 nm and high precision power control, focusing servo control are produced for thermal mode inorganic resist exposure. The small size opto-mechanical system combination with thermal mode lithography technology has been successfully applied to fabricate nickel stamper with submicro/nano structure patterns. The minimum pit (or hole) diameter is about 180 nm and ultra-low surface roughness (2 nm) is achieved after electroforming process.