Direct Thermal Nitridation of Silicon Dioxide Films in Anhydrous Ammonia Gas

5pp 10fig 1tab

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Bibliographic Details
Published inJournal of the Electrochemical Society Vol. 127; no. 9; pp. 2053 - 2057
Main Authors Ito, Takashi, Nozaki, Takao, Ishikawa, Hajime
Format Journal Article
LanguageEnglish
Published 01.01.1980
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Summary:5pp 10fig 1tab
Bibliography:ObjectType-Article-2
SourceType-Scholarly Journals-1
ObjectType-Feature-1
content type line 23
ISSN:0013-4651
1945-7111
DOI:10.1149/1.2130065