Direct Thermal Nitridation of Silicon Dioxide Films in Anhydrous Ammonia Gas
5pp 10fig 1tab
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Published in | Journal of the Electrochemical Society Vol. 127; no. 9; pp. 2053 - 2057 |
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Main Authors | , , |
Format | Journal Article |
Language | English |
Published |
01.01.1980
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Online Access | Get full text |
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Summary: | 5pp 10fig 1tab |
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Bibliography: | ObjectType-Article-2 SourceType-Scholarly Journals-1 ObjectType-Feature-1 content type line 23 |
ISSN: | 0013-4651 1945-7111 |
DOI: | 10.1149/1.2130065 |