Improvement of Power Supply Rejection Ratio in Wheatstone-bridge based piezoresistive MEMS

This paper deals with the design of MEMS-based sensors with piezoresistive transduction. It is demonstrated that when the sensor topology does not allow a perfect matching of resistances in the conditioning circuit (typically a Wheatstone bridge), the resolution of the system is limited by the abili...

Full description

Saved in:
Bibliographic Details
Published inAnalog integrated circuits and signal processing Vol. 71; no. 1; pp. 1 - 9
Main Authors El Mehdi, Boujamaa, Mailly, Frederick, Latorre, Laurent, Nouet, Pascal
Format Journal Article
LanguageEnglish
Published Boston Springer US 01.04.2012
Springer Verlag
Subjects
Circuits and Systems
Electrical Engineering
Engineering
Engineering Sciences
Micro and nanotechnologies
Microelectronics
Signal,Image and Speech Processing
Conditioning electronics
MEMS
Resistive sensor
Noise optimisation
Online AccessGet full text

Cover

More Information
Summary:This paper deals with the design of MEMS-based sensors with piezoresistive transduction. It is demonstrated that when the sensor topology does not allow a perfect matching of resistances in the conditioning circuit (typically a Wheatstone bridge), the resolution of the system is limited by the ability to reject power supply noise. As this ability increases when the output offset of the bridge decreases, the proposed architecture implements a feedback loop to control MOS transistors inserted in the Wheatstone bridge to compensate resistor mismatches. This zero-offset bridge exhibits a very good offset cancellation and therefore a better resolution.
ISSN:0925-1030
1573-1979
DOI:10.1007/s10470-010-9504-6