Phase stepping optical profilometry using fiber optic Lloyd's mirrors

A three-step phase stepping profilometry based on a fiber optic Lloyd's mirror assembly is employed in the optical profilometry for the first time to measure the shapes of 3D objects. Required π/2 phase shifts for interference fringe pattern are obtained by mechanically sliding the Lloyd assemb...

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Bibliographic Details
Published inApplied optics. Optical technology and biomedical optics Vol. 55; no. 4; p. 846
Main Authors Kösoğlu, Gülşen, Yüksel, Heba, Inci, Mehmet Naci
Format Journal Article
LanguageEnglish
Published United States 01.02.2016
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Summary:A three-step phase stepping profilometry based on a fiber optic Lloyd's mirror assembly is employed in the optical profilometry for the first time to measure the shapes of 3D objects. Required π/2 phase shifts for interference fringe pattern are obtained by mechanically sliding the Lloyd assembly via an ordinary micrometer stage. The experimental setup is simple and low cost to construct, and is insensitive to the ambient temperature fluctuations and environmental vibrations that cause unwanted effects on the projected fringe pattern. Consecutive interferograms are captured by a CCD camera and are processed with an algorithm to accomplish 3D topographies.
ISSN:2155-3165
DOI:10.1364/AO.55.000846