Power Generation Demonstration of Electrostatic Vibrational Energy Harvester with Comb Electrodes and Suspensions Located in Upper and Lower Decks

• Published in: Sensors and materials Vol. 34; no. 4; p. 1527
• Main Authors: Honma, Hiroaki, Mitsuya, Hiroyuki, Hashiguchi, Gen, Fujita, Hiroyuki, Toshiyoshi, Hiroshi
• Format: Journal Article
• Language: English
• Published: Tokyo MYU Scientific Publishing Division 14.04.2022
• Subjects: Decks; Energy harvesting; SOI (semiconductors); Substrates

In this paper, a vibrational energy harvester formed in a double-deck structure is presented. Comb electrodes covered with an electret skin are located in the active layer of a silicon on insulator (SOI) wafer, and suspensions are formed in the handle layer, thereby reducing the footprint to 62% of...