Power Generation Demonstration of Electrostatic Vibrational Energy Harvester with Comb Electrodes and Suspensions Located in Upper and Lower Decks

In this paper, a vibrational energy harvester formed in a double-deck structure is presented. Comb electrodes covered with an electret skin are located in the active layer of a silicon on insulator (SOI) wafer, and suspensions are formed in the handle layer, thereby reducing the footprint to 62% of...

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Bibliographic Details
Published inSensors and materials Vol. 34; no. 4; p. 1527
Main Authors Honma, Hiroaki, Mitsuya, Hiroyuki, Hashiguchi, Gen, Fujita, Hiroyuki, Toshiyoshi, Hiroshi
Format Journal Article
LanguageEnglish
Published Tokyo MYU Scientific Publishing Division 14.04.2022
Subjects
Decks
Energy harvesting
SOI (semiconductors)
Substrates
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Summary:In this paper, a vibrational energy harvester formed in a double-deck structure is presented. Comb electrodes covered with an electret skin are located in the active layer of a silicon on insulator (SOI) wafer, and suspensions are formed in the handle layer, thereby reducing the footprint to 62% of that of the previous model. For electrical interconnection between the SOI and handle layers, part of the SOI layer is formed into a cantilever that is designed to adhere to the substrate. When the device is mechanically excited by sinusoidal acceleration of 0.18 G (1 G = 9.8 m/s2), it generates a power of 13.2 µW, corresponding to a normalized power density (NPD) of 1.23 mW/cm3/G2.
ISSN:0914-4935
2435-0869
DOI:10.18494/SAM3785