Self-Centering Effect of a Thickness-Gradient Dielectric of an Electrowetting Liquid Lens
The experimental verification of the electrical centering effect of a thickness-gradient dielectric in an electrowetting micro liquid lens is presented. This device features an efficient centering scheme and easy fabrication. Two types of liquid lenses with a thickness-gradient and uniform-thickness...
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Published in | IEEE photonics technology letters Vol. 25; no. 6; pp. 623 - 625 |
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Main Authors | , , , |
Format | Journal Article |
Language | English |
Published |
New York
IEEE
15.03.2013
The Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
Subjects | |
Online Access | Get full text |
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Summary: | The experimental verification of the electrical centering effect of a thickness-gradient dielectric in an electrowetting micro liquid lens is presented. This device features an efficient centering scheme and easy fabrication. Two types of liquid lenses with a thickness-gradient and uniform-thickness dielectric layer are fabricated and experimentally compared. Repeatability tests for the off-centering error of the fabricated lenses are carried out for the same tuning range of focal length. The acquired maximum off-centering error for a thickness-gradient dielectric layer is 20 μm (equivalent to a tilt angle of 0.05°), whereas the lens with a uniform-thickness dielectric layer is 162 μm. Off-centering is considerably improved, even compared to the mechanical centering method using a conical geometry (50 μm). Moreover, the thickness-gradient dielectric layer could be easily fabricated using a photoresist reflow process, which reduces the required processing steps, making it suitable for mass production. |
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Bibliography: | ObjectType-Article-2 SourceType-Scholarly Journals-1 ObjectType-Feature-1 content type line 23 ObjectType-Conference-3 SourceType-Conference Papers & Proceedings-2 |
ISSN: | 1041-1135 1941-0174 |
DOI: | 10.1109/LPT.2013.2247392 |