On-line monitoring of one-step laser fabrication of micro-optical components
The use of an on-line monitoring method based on photoelasticity techniques for the fabrication of micro-optical components by means of controlled laser heating is described. From this description it is possible to show in real time the mechanical stresses that form the microelement. A new parameter...
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| Published in | Applied optics (2004) Vol. 40; no. 19; p. 3220 |
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| Main Authors | , |
| Format | Journal Article |
| Language | English |
| Published |
United States
01.07.2001
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| Online Access | Get more information |
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| Summary: | The use of an on-line monitoring method based on photoelasticity techniques for the fabrication of micro-optical components by means of controlled laser heating is described. From this description it is possible to show in real time the mechanical stresses that form the microelement. A new parameter, stressed area, is introduced that quantifies the stresses of a microelement during its fabrication, facilitating a deeper understanding of the physical phenomena involved in the process as well as being a useful test of quality. It also permits the stress produced in the manufacturing process and the optical properties of the final microelement to be correlated. The results for several microlenses monitored with this technique are presented. |
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| ISSN: | 1559-128X |
| DOI: | 10.1364/AO.40.003220 |