In-situ sputter deposition of PT and PZT films on platinum and RuO2 electrodes

Saved in:
Bibliographic Details
Published inMicroelectronic engineering Vol. 29; no. 1-4; pp. 177 - 180
Main Authors MAEDER, T, MURALT, P, SAGALOWICZ, L, SETTER, N
Format Conference Proceeding Journal Article
LanguageEnglish
Published Amsterdam Elsevier Science 01.12.1995
Subjects
Applied sciences
Electronics
Exact sciences and technology
Microelectronic fabrication (materials and surfaces technology)
Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices
Ternary compound
Microelectronic fabrication
Quaternary compound
Ferroelectric materials
Zirconium Titanates
In situ
Lead Titanates
Reactive sputtering
Experimental study
Sputter coating
Thin film
Online AccessGet full text

Cover

More Information
ISSN:0167-9317
1873-5568
DOI:10.1016/0167-9317(95)00139-5