Performance of a ruthenium beam separator used to separate soft x rays from light generated by a high-order harmonic light source

We describe the design and fabrication of a ruthenium beam separator used to simultaneously attenuate infrared light and reflect soft x rays. Measurements in the infrared and soft x-ray regions showed the beam separator to have a reflectivity of 50%-85% in the wavelength region from 6 to 10 nm at a...

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Bibliographic Details
Published inApplied optics. Optical technology and biomedical optics Vol. 55; no. 5; p. 984
Main Authors Ichimaru, Satoshi, Hatayama, Masatoshi, Ohchi, Tadayuki, Gullikson, Eric M, Oku, Satoshi
Format Journal Article
LanguageEnglish
Published United States 10.02.2016
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Summary:We describe the design and fabrication of a ruthenium beam separator used to simultaneously attenuate infrared light and reflect soft x rays. Measurements in the infrared and soft x-ray regions showed the beam separator to have a reflectivity of 50%-85% in the wavelength region from 6 to 10 nm at a grazing incidence angle of 7.5 deg and 4.3% at 800 nm and the same angle of grazing incidence, indicating that the amount of attenuation is 0.05-0.09. These results show that this beam separator could provide an effective means for separating IR light from soft x rays in light generated by high-order harmonic generation sources.
ISSN:2155-3165
DOI:10.1364/AO.55.000984