Field Oxide n-channel MOS Dosimeters Fabricated in CMOS Processes
This paper presents a new technique to build MOS dosimeters using unmodified standard CMOS processes. The devices are n-channel MOS transistors built with the regular Field Oxide as a thick radiation-sensitive gate. The devices were fabricated in two different commercial 0.6 μm CMOS processes, gate...
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Published in | IEEE transactions on nuclear science Vol. 60; no. 6; pp. 4683 - 4691 |
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Main Authors | , , , , , , |
Format | Journal Article |
Language | English |
Published |
New York
IEEE
01.12.2013
The Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
Subjects | |
Online Access | Get full text |
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Summary: | This paper presents a new technique to build MOS dosimeters using unmodified standard CMOS processes. The devices are n-channel MOS transistors built with the regular Field Oxide as a thick radiation-sensitive gate. The devices were fabricated in two different commercial 0.6 μm CMOS processes, gate oxide thicknesses of ~600 nm and ~400 nm. Responsivities up to 4.4 mV/rad with positive bias, and 1.7 mV/rad with zero gate bias were obtained in the thicker oxides. The effect of charge trapped in the oxide and interface states on the shift in the threshold voltage are analyzed. |
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Bibliography: | ObjectType-Article-1 SourceType-Scholarly Journals-1 ObjectType-Feature-2 content type line 23 |
ISSN: | 0018-9499 1558-1578 |
DOI: | 10.1109/TNS.2013.2287256 |