Analytical Compact Model in Verilog-A for Electrostatically Actuated Ohmic Switches

• Published in: IEEE transactions on electron devices Vol. 61; no. 6; pp. 2186 - 2194
• Main Authors: Bazigos, Antonios, Ayala, Christopher L., Fernandez-Bolanos, Montserrat, Yu Pu, Grogg, Daniel, Hagleitner, Christoph, Rana, Sunil, Qin, Tyson Tian, Pamunuwa, Dinesh, Ionescu, Adrian M.
• Format: Journal Article
• Language: English
• Published: New York IEEE 01.06.2014; The Institute of Electrical and Electronics Engineers, Inc. (IEEE)
• Subjects: Analytical models; Cantilever; compact model; Computational modeling; Contacts; Devices; Electronics; electrostatic actuation; Force; Integrated circuit modeling; Integrated circuits; Logic gates; Mathematical analysis; Mathematical models; MEM; NEM; Numerical models; Ohmic; ohmic switch; Power consumption; relay; switch; Switches; Verilog-A; electrostatic actuation; compact model; MEM; NEM; relay; ohmic switch; Cantilever; switch; Verilog-A
• ISSN: 0018-9383; 1557-9646
• DOI: 10.1109/TED.2014.2318199

Nowadays, electronics face a challenge regarding the power consumption of integrated circuits (ICs). There is a need for new devices that can provide improved switching capabilities. The downscaled electrostatically actuated ohmic switch, as a (re)emerging device, is a promising candidate to meet this need. To bring such a device seamlessly into IC design, it must be accompanied by an accurate, fast and robust analytical compact model. The development and the main characteristics of such a model are described within this paper. Extensive numerical simulations and measurements have been used to validate the model.