HRTEM Images of a-C:H Thin Films Deposited by G-TVA Technique

The aim of this paper is to an report analysis of the different characteristics of the coatings obtained by an extension in applicability of the thermionic vacuum arc method, i.e., gaseous thermionic vacuum arc using gases as precursors, instead of solid materials. The morphology and structure of th...

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Bibliographic Details
Published inIEEE transactions on plasma science Vol. 39; no. 11; pp. 2802 - 2803
Main Authors Vladoiu, R., Ciupina, V., Contulov, M., Mandes, A., Dinca, V., Prodan, M.
Format Journal Article
LanguageEnglish
Published New York IEEE 01.11.2011
The Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subjects
Anodes
Carbon
Cathodes
Coatings
Deposition
Discharges
Electron microscopy
Gaseous thermionic vacuum arc (GTVA)
Gases
high-resolution TEM (HRTEM)
Materials
Morphology
Plasmas
Precursors
thermionic vacuum arc (TVA)
Thermionics
Thin films
Transmission electron microscopy
Vacuum arcs
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Summary:The aim of this paper is to an report analysis of the different characteristics of the coatings obtained by an extension in applicability of the thermionic vacuum arc method, i.e., gaseous thermionic vacuum arc using gases as precursors, instead of solid materials. The morphology and structure of the film were investigated by transmission electron microscopy (TEM) provided by high-resolution TEM with 1.4-Å resolution and 1.2-M magnification.
Bibliography:ObjectType-Article-1
SourceType-Scholarly Journals-1
ObjectType-Feature-2
content type line 23
ISSN:0093-3813
1939-9375
DOI:10.1109/TPS.2011.2160973