Extension of the Measurement Range of MOS Dosimeters Using Radiation Induced Charge Neutralization

This work proposes a new measurement technique to extend the dose range of MOS dosimeters. The technique consists on alternating stages of positive oxide charge buildup with stages of radiation induced charge neutralization, maintaining a uniform sensitivity along the whole measurement. The techniqu...

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Bibliographic Details
Published inIEEE transactions on nuclear science Vol. 55; no. 4; pp. 2141 - 2147
Main Authors Faigon, A., Lipovetzky, J., Redin, E., Krusczenski, G.
Format Journal Article
LanguageEnglish
Published New York IEEE 01.08.2008
The Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subjects
Charge
Charge measurement
Construction
Current measurement
Dosimeters
Dosimetry
Electron traps
Gamma ray effects
gamma rays
Laboratories
Measurement techniques
Metal oxide semiconductors
MOS devices
Oxides
Physics
Radiation effects
Repeatability
Reproducibility
Saturation
Threshold voltage
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Summary:This work proposes a new measurement technique to extend the dose range of MOS dosimeters. The technique consists on alternating stages of positive oxide charge buildup with stages of radiation induced charge neutralization, maintaining a uniform sensitivity along the whole measurement. The technique was applied with 70 nm MOS dosimeters, extending the dose measurement range from less than a kilogray to more than 675 kGy without showing wear effects. An initial saturation of interface traps creation ensures repeatability in the responses.
Bibliography:ObjectType-Article-1
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ISSN:0018-9499
1558-1578
DOI:10.1109/TNS.2008.2000767