Low-Power Interface IC for Triplate Electrostatic Energy Converters

• Published in: IEEE transactions on power electronics Vol. 28; no. 2; pp. 609 - 614
• Main Authors: Kempitiya, A., Borca-Tasciuc, D. A., Hella, M. M.
• Format: Journal Article
• Language: English
• Published: New York, NY IEEE 01.02.2013; Institute of Electrical and Electronics Engineers; The Institute of Electrical and Electronics Engineers, Inc. (IEEE)
• Subjects: Applied sciences; Capacitance; Capacitors; Design. Technologies. Operation analysis. Testing; Dielectric, amorphous and glass solid devices; Electrical engineering. Electrical power engineering; Electronics; Electrostatic converters; Electrostatics; Energy; Energy conversion; Energy harvesting; Energy. Thermal use of fuels; Exact sciences and technology; Generators; Integrated circuits; integrated microscale power generators; Interfaces; Power electronics, power supplies; Rational use of energy: conservation and recovery of energy; Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices; Sensors; triplate variable capacitors; Electric generator; Output power; Vibration; Power circuit; Energy convertor; Macroscopic structure; Electrostatic converters; energy harvesting; Energy recovery; Power electronics; Low power; integrated microscale power generators; Steady state; Low energy; Energy loss; Variable capacitor; High voltage; Complementary MOS technology; Integrated circuit; Energy conversion; Electric energy; Low-power electronics; Power integrated circuits; triplate variable capacitors
• ISSN: 0885-8993; 1941-0107
• DOI: 10.1109/TPEL.2012.2213676

This letter proposes a low-power energy harvesting circuit (EHC) that performs synchronous energy conversion on a triplate variable capacitor to improve the maximum achievable output power. A triplate macro-scale electrostatic generator with capacitor variation of 405 pF to 1.15 nF and 405 pF to 1.07 nF on two complementary adjacent capacitors operating 180° out of phase at 98 Hz is fabricated and used in the characterization of the designed EHC. The integrated circuit is fabricated using AMI 0.7-μM high-voltage CMOS process and tested with the triplate capacitor to demonstrate mechanical to electric energy conversion. At steady state, the EHC produces 3.26 nJ/cycle, including energy flyback losses. This results in a total output power of approximately 308 nW on a 10-μF reservoir capacitor from a 98-Hz vibration signal.