Design and modeling of equipment used in electrochemical processes for microelectronics

This paper presents an overview of the design of electrochemical processing equipment for semiconductor and related microelectronic manufacturing as well as a review of publications that are applicable to electrochemical wafer process equipment. We discuss several types of electrochemical processes...

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Bibliographic Details
Published inIBM journal of research and development Vol. 49; no. 1; pp. 65 - 77
Main Authors Ritzdorf, T L, Wilson, G J, McHugh, P R, Woodruff, D J
Format Journal Article
LanguageEnglish
Published Armonk International Business Machines Corporation 01.01.2005
Subjects
Automation
Chemistry
Copper
Design engineering
Electrical equipment
Manufacturing
Microelectronics
Preventive maintenance
Robots
Solid modeling
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Summary:This paper presents an overview of the design of electrochemical processing equipment for semiconductor and related microelectronic manufacturing as well as a review of publications that are applicable to electrochemical wafer process equipment. We discuss several types of electrochemical processes applicable to wafer processing and the considerations that go into automated equipment for these processes. The design of such equipment is considered from a general perspective, as well as specifically with respect to several electrochemical processes. We also present results from reactor-scale modeling of several associated systems. The modeling results have been used to understand the effects of process parameters and hardware design on the results achieved. [PUBLICATION ABSTRACT]
Bibliography:ObjectType-Article-2
SourceType-Scholarly Journals-1
ObjectType-Feature-1
content type line 23
ISSN:0018-8646
0018-8646
2151-8556
DOI:10.1147/rd.491.0065